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Beyond
超越:领先一步的技术,领先一步的思想,不断的学习, 不断的超越。
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Efficient
高效:以高效简化我们的工作,以高效保证我们的领先。
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开放:开放的同事关系,开放的客户关系,开放的竞争关系。
产品列表

电子枪

电子枪 电源

水蒸汽低温阱

原位光谱监测仪

石英薄膜沉积控制仪

光谱等离子体化学监控仪

E-Beam Source Power Supply Family

Model TT-3/6

Tetrode Power Supplies

  • Full power 3/5.5 kW
  • Tetrode tube for superior instantaneous arc-down recovery with +/-2% voltage regulation
  • Adjustable constant voltage maintains stable beam position
  • 19 Inch rack mountable TT-3, 10.50" (6U) high & TT-6, 14.00" (8U) high Control, 5.25" (3U) high
  • Handheld remote with joystick sweep control, Filament, High Voltage ON and Emission Control
  • Four pattern sweep memory module standard
  • Constant emission current regulation +/-2%
  • Completely interlocked for operator safety
  • Air cooled

Model TT-10/15

Tetrode Power Supplies

  • 10 or 15 kW output power for simultaneous operation of up to 3 electron beam sources
  • Full power 15 kW tetrode tube for superior instantaneous arc-down recovery with +/-2% voltage regulation
  • Adjustable constant voltage maintains stable beam position
  • Easy access from top and all sides for servicing
  • Full remote operation from PLC or optional Handheld for both High Voltage and Source.
  • Constant emission current regulation +/-2% Optional programmable sweep

Model ST-4/6

Solid State Power Supplies

  • Adjustable constant voltage maintains stable beam position
  • Constant emission current regulation +/-2%
  • Digital Indicators Full remote operation from PLC or optional Handheld for both High Voltage and Source
  • 19 Inch rack mountable 17.50" (10U) high
  • Weighs only 100/125 pounds
  • Superior protection circuitry allows almost instantaneously recovery from source arcing.
  • Optional programmable sweep

 

Model Numbers
 

1 Gun

2 Gun

 3 Gun

TT-3

50/60 Hz

TT-3

   

TT-6

60 Hz

TT-6

   

50 Hz

TT-6E

TT-10

60 Hz

TT-10-1

TT-10-2

TT-10-3

50 Hz

TT-10-1E

TT-10-2E

TT-10-3E

TT-15

60 Hz

TT-15-1

TT-15-2

TT-15-3

50 Hz

TT-15-1E

TT-15-2E

TT-15-3E

ST-4

50/60 Hz

ST-4

   

ST-4E

ST-6

50/60 Hz

ST-6

   

ST-6E

 
Specifications
 

TT-3

TT-6

TT-10

TT-15

ST-4

ST-6

Tetrode

Tetrode

Solid State

Maximum Power

3 kW
450ma @7kV
550ma @6kV
650ma @5kV

5.5 kW
725ma @7.5kV

10 kW
1.0 A @ 10kV

15 kW
1.5 A @ 10kV

4 kW
0.4 A @ 10kV

6 kW
0.6 A @ 10kV

HV (adjustable)

tap adjustable -4 to -7 kV

-6.5 to -7.5 kV

-6 to -10 kV

-6 to -10 kV

Process Control Voltage

0 to -10 VDC

0 to +/-10 VDC

0 to +/-10 VDC

Current Cutback (adj.)

Factory Adjust

0.2 to 1 amp

0.2 to 1.5 amps

0.2 to 0.4 amp

0.2 to 0.6 amp

Response Time

<100 microseconds

<100 microseconds

<100 microseconds

Gun Filament

3 V @ 22 A

4.5 V @ 32 A

5.5 V @ 36 A

7 V @ 45 A

3.5 V @ 27 A

4.5 V @ 32 A

Lateral /Long. Beam Sweep

+/-1.5 amp @ 3W, 3-90 Hz

+/-1.5 amp @ 3W, 3-90 Hz
+/- 2.0 amps optional

+/-1.5 amp @ 3W, 3-90 Hz
+/- 2.0 amps optional

Cooling

Air

Air

Air

  • Other voltages are available as special orders, prices and delivery will vary.

Installation Requirements

  •     TT-3     208-240 VAC /1 , 50/60 Hz, 40 A
  •     TT-6     208/240 VAC /3 , 60 Hz, 50A
  •     TT-6E     380/415 VAC /3 , 50 Hz, 40A
  •     TT-10     208/240 VAC /3 , 60 Hz, 70A
  •     TT-10E     380/415 VAC /3 , 50 Hz, 50A
  •     TT-15     208/240 VAC /3 , 60 Hz, 80A
  •     TT-15E     380/415 VAC /3 , 50 Hz, 60A
  •     ST-4     208-240 VAC /3 , 50/60 Hz, 20 A
  •     ST-6     208-240 VAC /3 , 50/60 Hz, 30 A


 

A Choice of Sweeps

 

Programmable XY Sweep

 

 

The programmable XY sweep controls pinpoint location of the E-Beam source beam spot. Patterns are viewable from the LED display. Programs can be edited to change frequency, dwell and location

  • Edit screen, 20 characters by 4 rows
  • Store 120 patterns
  • Pattern path length 99 steps
  • Compatible with all transverse beam sources
  • User may edit any step in a program without re-writing the program
  • Variable dewll time at each step
  • Preprogrammed with sample patterns
  • Unit adjusts output to match deflection characteristics of each source, so displayed pattern mirrors actual pattern in the chamber.
  • Dual channel output +/- 1.5 amps
  • Frequency range 1 to 500 Hz, depending on pattern structure
  • Active remote joy stick controls programming patterns modifications or temporary repositioning of patterns center as well as addressing the first nine patterns to simplify installation
  • Output polarity switch is reversible to ease installation
  • Included PSLink software allows user to creat or edit patterns on thier PC using a mouse uplaod, download or save to disk. The number of pattern files is only limited by the space on the PC


 

 

XY Sweep, with Remote/Memory Module
Standard with all Power Supplies

 

 

XY beam sweep control with selectable trangle or oscillating circle patterns. Includes hand held joy stick remote control and four pattern storage module, either of which can be operated from a 10 foot cable


 

 

XY Sweep

 

 

XY beam sweep control with three selectable patterns - sawtooth, circular and sinusoldal. State of the art technology with advanced protection circuitry makes the Sweep rugged and reliable. An optional hand held remote control is available. The beam movement is displayed ona LED bar graph. Available only in half rack configuration.

 

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