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FTPadvanced 膜厚探针
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SENTECH公司的FTPadvanced膜厚探针是一种基于白光反射光谱用于测量反射透明和吸收基片上透明和弱吸收膜厚度的测量仪器. 反射基片上镀制薄膜的反射光谱由于光的干涉进行了调制, 测量光谱的干涉同薄膜的特性和基片的折射率的函数, 因此, 薄膜的厚度可通过付立叶变换求得.该仪器可单独使用测量膜厚, 或同光学显微镜以及椭偏仪或反射仪联合应用 |
| 测量时间: |
300 ms |
| 厚度范围: |
50 - 20000 nm (FTPadv-1),50 - 25000 nm (FTPadv-2) |
| 准确度 (0.4 微米厚膜): |
1 nm |
| 精度 (0.4 微米厚膜): |
0.3 nm (1 sigma) |
| 测量点尺寸 (FTPadv-1, 带显微镜时): |
直径 80 微米 (10倍镜头) |
| 测量点尺寸 (FTPadv-2, 不带显微镜时?): |
直径大约 2 - 4 毫米,取决于样品和物镜间距离 |
| 光源 |
高稳定 20 W卤素灯, 光纤连接. |
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 注: 光学显微镜和计算机为选配,可利用客户现有设备
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特点:
- 强大可靠的数据库
- Measures the thickness and refractive index of transparent and weakly absorbing films on reflective and glass substrates
- Menu driven software ensures easy operation
- An entire spectrum can be measured in less than 300 ms
- 32bit software runs under WinNT, Win2000, WinXP on any modern notebook or desktop PC
- Measurement may be set to continously
- Measures film thickness from 50 nm up to 20000 nm with high accuracy and reproducibility
- Ease of use is built in by predefined applications
- Any layer out of a multilayer sample may also be measured
- Statistical analysis, measured values and sample/operator identification are all output in a protocol which can be printed and/or stored on disk
- Additional mapping software which can control a motor driven sample stage
- The lateral distribution of the film thickness, the reflectivity (at constant wavelength) or the position (wavelength axis) of a spectral peak, can be measured and displayed using the available plot options.
- Can be used with or without a microscope; normal incident white light is used.
| Semiconductor device manufacturing |
Oxides, nitrides, oxynitrides
Photoresists, polyimides
a-Silicon, polysilicon on oxide on silicon
Bragg reflectors on GaAs, InP |
| Photovoltaic device manufacturing |
Transparent electrodes
Antireflective coatings
Titanium oxide on transparent substrates |
| Electrochemistry |
Titanium oxide on titanium |
| Packaging material manufacturing |
Polymer films on aluminum foils, sheet metals, papers |
| Decorative materials manufacturing |
Aluminium oxide on aluminum |
| CD manufacturing |
Polymer films on aluminum
Photoresists on glass |
| Optics manufacturing |
Coatings on glass, polymers, mirrors |
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