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产品列表 |
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SC系列石英振子传感器(5MHZ,6MHZ)(0.49",0.55")
S,D,B,R系列晶振传感头(单晶, 双晶, 6晶, 可烘烤,可调节
TM-100，TM-350, TM-400薄膜沉积监测仪
MDC-360/361 and MDC-370薄膜沉积控制仪
液态镀膜与刻蚀 |
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薄膜沉积监测仪
Maxtek 提供三种薄膜沉积监测仪: TM-100,
TM-350, TM-400. TM-100是一种成本单一膜层检测仪.TM-350是一种中价位,可存储100种膜系,
有计算机接口,多功能沉积速率,膜厚,晶体频率显示.TM-400是Maxtek最先进的的薄膜沉积监测仪, 具有TM-350的所有功能,并且更好16倍测量分辨率及双传感器自动晶体振子切换.
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Feature Description
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Maxtek TM-100
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Maxtek TM-350
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Maxtek TM-400
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Sycon STM-100/MF
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Inficon XTM/2
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| Large easy
to read LED displays |
Yes
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Yes
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Yes
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No
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No
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| Automatic
crystal switching |
No
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No
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Yes
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No
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No
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| Number
of digits for rate display |
3
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4
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4
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3
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3
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| Measurement
Resolution (Hz) |
0.5
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0.5
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0.03
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Not Specified
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0.1
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| Measurement
Update Rate (Hz) |
0.4 to 5
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0.5 to 10
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0.5 to 10
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4
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4
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| Supports
multiple sensor crystal frequencies |
No
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Yes
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Yes
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No
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No
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| Analog
outputs |
1 Channels
Rate or Thickness
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2 Channels
Rate and Thickness
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2 Channel
Rate and Thickness
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1 Channel Rate
or Thickness
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1 Channel
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| Sensor
crystal inputs |
1
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1
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2
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1
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1
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| Discrete
TTL Inputs |
3
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5
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5
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4
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5
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| Relay Outputs |
1
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1
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2
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4
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4
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| Film storage |
1
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100
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100
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9
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9
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| Computer
interface |
None
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RS-232 Standard
RS-485 Optional IEEE488
Optional
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RS-232 Standard
RS-485 Optional IEEE488
Optional
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RS-232 Standard
IEEE488 Optional
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RS-232 Standard
IEEE488 Optional
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