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产品列表 |
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SC系列石英振子传感器(5MHZ,6MHZ)(0.49",0.55")
S,D,B,R系列晶振传感头(单晶, 双晶, 6晶, 可烘烤,可调节
TM-100，TM-350, TM-400薄膜沉积监测仪
MDC-360/361 and MDC-370薄膜沉积控制仪
液态镀膜与刻蚀 |
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薄膜沉积控制仪
不同于薄膜沉积监测仪, 薄膜沉积控制仪利用闭环回路可进行镀膜过程中的沉积速率及膜厚的控制.MDC-360,
MDC-361 和 MDC-370是Maxtek三 种型号的薄膜沉积控制仪. MDC-360 是基本型,前面输入,操作简单,
功能全.? MDC-361是 简化黑箱型,无输入键盘, 需通过计算机接口控制. MDC-370为扩展型,可接
控制六个沉积源.
Maxtek的MDC-360, MDC-370 及同其他家产品比较:
| Feature Description |
MDC-360 |
MDC-370 |
STC-200/SQ |
IC5 |
| Large,
easy to read LED displays |
Yes |
Yes |
No |
No |
| Internal speaker for audible warnings |
Yes |
Yes |
No |
No |
| User
named process, materials, and I/O's |
Yes |
Yes |
No |
No |
| Automatic crystal switching on failure |
Yes |
Yes |
Yes |
Yes |
| Built
in materials library |
Yes |
Yes |
No |
Yes |
| Supports multiple rate ramps |
Yes |
Yes |
No |
Yes |
| Supports source pocket position control |
Yes |
Yes |
No |
Yes |
| Supports sensor crystal position control |
Yes |
Yes |
No |
Yes |
| Supports multiple sensor crystal frequencies |
Yes |
Yes |
No |
No |
| Optional Windows interface software for PC |
Yes |
Yes |
No |
No |
| Analog
outputs |
2
Channels |
2
Channels |
1
Channel |
6
Channels shared??
with source outputs |
| Source
control outputs |
2-Standard??
2-Optional |
2-Standard
4-Optional |
1-Standard |
6-Standard shared??
with analog outputs |
| Sensor
crystal inputs |
2-Standard??
2-Optional |
2-Standard
4-Optional |
2-Standard |
2-Standard
6-Optional |
| User
programmable TTL inputs |
8-Standard??
8-Optional |
8-Standard
8-Optional |
8-Standard
8-Optional |
14-Standard
14-Optional |
| User
programmable relay outputs |
8-Standard??
8-Optional |
8-Standard
8-Optional |
8-Standard
8-Optional |
8-Standard
16-Optional |
| Material storage |
32 |
32 |
9 |
24 |
| Process storage |
99 |
99 |
9 |
50 |
| Layer
storage |
999 |
999 |
99 |
250 |
| Computer interface |
RS-232 Standard??
RS-485 Optional??
IEEE-488 Optional |
RS-232 Standard
RS-485 Optional
IEEE-488 Optional |
RS-232 Standard
IEEE-488 Optional |
RS-232 Standard??
IEEE-488 Optional |
| Resume
mode |
Yes |
Yes |
No |
Yes |
| Runs
cool - no fan |
Yes |
Yes |
Yes |
No |
| 4
instant graphs |
Yes |
Yes |
No |
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MDC-360
技术指标：
| MEASUREMENT |
| Frequency Resolution |
0.03 Hz @ 6.0 MHz |
| Mass Resolution |
0.375 Ng/cm2
(0.014 ? Al) |
| Thickness Accuracy |
0.5% + 1 count |
| Measurement Update
Rate |
Dynamically adjusted,
.5 to 10 Hz |
| Display Update
Rate |
10 Hz |
| Sensor Crystal
Frequency |
2.5, 3, 5, 6, 9.5,
10 MHz |
| DISPLAY
(MDC-360 ONLY) |
| Thickness Display |
Autoranging:?
0.000 to 999.9 k? |
| Rate |
Autoranging:?
00.0 to 999 ?/Sec |
| Power Display |
00.0 to 99.9% |
| Time To Go |
0:00:00 to 9:59:59?
H:MM:SS |
| Crystal Health% |
00% to 99% |
| Layer Number |
001 to 999 |
| Graphics Display |
256 × 64 LCD with??
CCFL backlighting |
| COMMUNICATION |
| |
RS-232 serial port
standard?
RS-485 serial port optional?
IEEE-488 optional |
| PROGRAMMING |
| All programming
and system configuration is done through the
LCD display. Programming is divided into three
sections: Process, Material, and System. Password
protection is available at the Edit, View and
Run levels. Defaults to no protection |
| PROCESS
PROGRAMMING |
| The MDC-360
can store up to 99 user defined processes. A
process is a sequential list of defined layers.
A layer is defined by two parameters, its material
and its thickness. The MDC-360 can store up
to 999 defined layers. |
| PROCESS
PARAMETERS |
| Process Name |
12 character string |
| Edit Password |
4 character string |
| Run/View Password |
4 character string |
| Layer# 1 to 999 |
Material name, Thickness |
| MATERIAL
PROGRAMMING |
| The MDC-360
can store up to 32 user defined materials. A
material is defined by the following set parameters: |
| MATERIAL
PARAMETERS |
| Material Name |
10 character string |
| Material Password |
4 character string |
| Sensor # |
1 to 4 |
| Crystal # |
1 to 8 |
| Source # |
1 to 4 |
| Pocket # |
1 to 8 |
| Density |
0.80 to 99.99 gm/cm3 |
| Acoustic Impedance |
4.00 to 59.99 gm/cm2
sec |
| Tooling Factor |
10.0 to 499.9% |
| Proportional gain |
1 to 9999 |
| Integral Time |
0 to 99.9 sec |
| Derivative Time |
0 to 99.0 sec |
| Rise to Soak Time |
0 to 9:59:59 |
| Soak Power |
0 to 99.9% |
| Soak Time |
0 to 9:59:59 |
| Rise to Predeposit |
0 to 9:59:59 |
| Predeposit Power |
0.0 to 99.9% |
| Predeposit Time |
0 to 9:59:59 |
| Rate Establish
Time |
0 to 99 sec |
| Rate Establish
Error |
0 to 99.9% |
| Deposition Rate |
(4 possible) 000.0
to 999.9 ?/sec |
| Rate Ramp Start |
(4 possible) 0.000
to 999.9 K? |
| Rate Ramp Stop |
(4 possible) 0.000
to 999.9 K? |
| Time Setpoint |
0 to 9:59:59 |
| Ramp to Feed Time |
0 to 9:59:59 |
| Feed Power |
0 to 99.9% |
| Feed Time |
0 to 9:59:59 |
| Ramp to Idle Time |
0 to 9:59:59 |
| Idle Power |
0 to 99.9% |
| Maximum Power |
0 to 99.9% |
| Power Alarm Delay |
0 to 99 sec |
| Minimum Power |
0 to 99.9% |
| Rate Deviation
Attention |
0 to 99.9% |
| Rate Deviation
Alarm |
0 to 99.9% |
| Rate Deviation
Abort |
0 to 99.9% |
| Sample Dwell |
0 to 100% |
| Sample Period |
0 to 9:59:59 |
| Crystal Fail |
Switch, halt, or
time power |
| Backup Sensor
# |
1 to 4 |
| Backup Tooling
Factor |
10 to 499.9% |
| Backup Crystal
# |
1 to 8 |
| I/O
CAPABILITY |
| Standard |
|
| Sensor
Inputs |
2
standard, BNC |
| Source
Outputs |
2
fully isolated, 2.5, 5 & 10 volts @
20 ma., 0.02% resolution |
| *
Passive Inputs |
8
fully programmable, ground true
4.7 kohm pull up to 5 VDC |
| *
Active Inputs |
8
fully programmable, 10.5 - 130 VAC @
50 - 60 Hz or 10.5 VDC |
| ?
* Choice of input type |
| Relay
Discrete Outputs |
8
fully programmable SPST relay,
120 VA, 2A max. |
| Abort
Relay Output |
SPST
relay, 120 VA, 2A max. |
| Communication,
RS-232 |
Rear
Panel, 9 pin AT, full duplex
Front Panel, RJ-11-6 POS jack, full duplex |
| Remote
power handset |
Front
Panel, RS-11-4 POS jack |
| Options,
Factory Installed |
| RS-485
serial communications port. Rear panel RS-232
can be replace with RS-485 |
| Options,
User Installed |
| Source/Sensor
board increases number of sources and sensor
to four. I/O board doubles number of inputs
and outputs to 16.??
IEEE-488 communication
card
|
| INPUT
SET UP |
|
| Each individual
input can be set up to initiate a specific action,
under specific conditions, for a specific input
state. Inputs associated with pocket or crystal
position feedback are predefined |
| OUTPUT
SET UP |
|
| Each individual
output can be set up to respond in a specific
manner to a specific set of conditions. Outputs
associated with pocket rotation or crystal changing
are predefined. |
| SENSOR
SET UP |
|
| Each sensor
can be configured to control a single, dual,
or multiple crystal sensor head. A sensor is
defined with the following parameters: |
| SENSOR
PARAMETERS |
|
| Number of crystals |
1 to 8 |
| Shutter Relay Type |
Dual, Normally Open,
Normally Closed, None |
| Control |
Manual, Direct, BCD,
Individual |
| Drive |
Up, Down, Fast, Inline,
Single Step, Double Step |
| Feedback Type |
Individual, BCD,
Single Home, In Position, No Feedback |
| Rotator Delay |
0-99 sec |
| SOURCE
SET UP |
|
| Each source
can be configured to control a single, or multiple
pocket source with manual or automatic pocket
rotation. |
| SOURCE
PARAMETERS |
|
| Number of Pockets |
1 to 8 |
| Shutter Relay Type |
Normally Open, Normally
Closed, None |
| Shutter Delay |
0 - 9.9 sec |
| Control |
Manual, Direct, BCD,
Individual |
| Drive |
Up, Down, Fast, Incline,
Single Step, Double Step |
| Feedback Type |
Individual, BCD,
Single Home, In Position, No Feedback |
| Rotator Delay |
0 - 99 sec |
| Source Voltage |
2.5, 5, 10 V |
| DAC
RECORDER SET UP |
| The MDC-360
has 2 analog, chart recorder outputs. The recorder
outputs are configured with the following parameters: |
| RECORDER
PARAMETERS |
| Recorder #1 / #2
output |
Rate, Rate Dev.,
Power, or Thickness |
| Recorder #1 / #2
scale |
Full Scale %, 2/3
Digit. |
| RECORDER
SPECIFICATION |
| Output |
0 to 5V |
| Resolution |
0.02% |
| UTILITY
SET UP |
| The utility
menu contains a number of parameters which do
not belong elsewhere. Some of the parameters
are: |
| Crystal Frequency |
2.5, 3, 5, 6, 9,
10 MHz |
| Simulate Mode |
On / Off |
| IEEE-488/RS-485 Address |
1 to 32 |
| Attention Volume |
0 to 10 |
| Alert Volume |
0 to 10 |
| Alarm Volume |
0 to 10 |
| Time? |
0 to 23:59 — Optional |
| Date |
MM / DD / YY — Optional |
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