Components are Titanium sublimation pump, vacuum conduit,
adjustable grating and lens, etc.
Working pressure: 1กม10 -3Pa
Vacuum
maintaining period: Longer than 3 month
Vacuum
System with Precisiom Dosing Control
Vacuum
system with precision dosing control
Used for the gas venting and dosing for the precise
vacuum encapsulation components
Oil-free environment
Ultimate pressure: 3 กม 10 -4Pa
Plasma
Diagnose Equipment
Used
for R&D low temperature plasmaRIE & Plasma.
Surface vacuum chamber are made up by the stainless
steel, turbopump is the main dry vane pump, ultrimate
pressure 5*10-5Pa.