System Space Enviromment Simulation System

Used for simulating the outer-space thermo-vacuum environment. Space-aircraft or other equipment for experiment can be put in the vacuum chamber. The system can be used for the thermo-vacuum experiment, thermo-cycle experiment, thermo-control experiment, anti-static experiment and thermo-optical experiment, etc.

Inner size: φ1000mm, φ2000mm, φ3000mm

Ultimate pressure: coldness ( -173℃ ～ -60℃ ） 1×10 -5Pa; hotness （＋ 100℃ ） 1×10 -4Pa

Temperature uniformity: ±5℃

Over 360 hours non-stop operation

A versatile sputtering deposition system,capable of co-sputtering deposition of maximum 4 targets, or one-to-one separate sputtering processes simultaneously.

Targets: four 4” （ φ100 ） targets

Number of self-rotating rack: 4

Ultimate pressure : 510 -5Pa

Program-controlled coating process