Beijing LeyFond Vacuum Tech. Co., Ltd

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Ultra-high Vacuum Evacuation System

Used for the Evacuation process of electronic vacuum devices

Ultimate pressure: below 3×10^-7Pa ～ 5×10^-9Pa

Oven temperature: 600℃ ， program control with the precision± 1℃

Single, double, and multiple (3~14) stations possible

Different size baking chamber combinations

Type	CP1	CP2	CP3	CP4	CP5	CP6	CP7	CP8	CP9
work stations	2	5~14	1	2	1	1~4	2	3	2
vacuum system	Vane pump Turbo pump Ion pump (Cryo-pump)	Dry pump Turbo pump Ion pump (Cryo-pump)	Vane pump Turbo pump Ion pump	Vane pump Turbo pump Ion pump	Vane pump Turbo pump Ion pump	Ion pump Absorbtion pump	Vane pump Turbo pump	Vane pump Turbo pump Ion pump	Vane pump Turbo pump Ion pump
Ultimate pressure	5×10^-8Pa	5×10^-8Pa	2×10^-7Pa	2×10^-7Pa	4×10^-7Pa	8×10^-7Pa	5×10^-6Pa	5×10^-7Pa	8×10^-8Pa
Effect heating area	φ600*1200	φ500*1000	φ600*1200	φ500*600	φ800*2000	φ500*600	φ500*1200	φ800*400	φ1100*3000
Oven pressure	600℃	600℃	550℃	550℃	550℃	500℃	550℃	450℃	600℃
Oven vacuum	2Pa	2Pa	2Pa	2Pa	2Pa	常压	2Pa	Normal	5*10-3Pa
Lift type	Two pole mechanical	Two pole mechanical	One pole hydraulic	One pole hydraulic	One arm side door	One pole hydraulic	Two pole mechanical	Two pole mechanical	lift
Lift distance	1200	1000	600	600	0	600	1200	500	3000
Control methode	Manual+Auto	Manual+Auto	Manual+Auto	Manual	Manual+Auto	Manual+Auto	Manual	Manual	Manual+Auto
Max power	30kw	30kw	15kw	15kw	55kw	12kw	20kw	12kw	80kw