单频电源

• CB Series (High Frequency)

• CX Series (High Frequency)

• CLX Series (Low Frequency)

• CX 5K & CX 10K

• CPS Series

• CLF 5000 Series

• CV Series

• CXH Series

双频电源

• CDX 2000

• CDX 6000 Dual Process Energy Generator

直流电源

• XDC Series

静电嵌盘直流电源

• ESC Series

自动调谐匹配网

• CPM Series

实时功率测控仪

RPMX Monitor and Control System

Patented S Technology

CB Series (High Frequency)

The CB series RF power supplies are the perfect solution for tool-mount applications and shrinking budgets. These compact, lightweight power supplies will provide years of stable, reliable operation.

CX Series (High Frequency)

The CX series power supplies start at power ranges from 600 to 3500 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost ofb ownership with high reliability.?

CLX Series (Low Frequency)

The CLX series low frequency power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.

CX 5K & CX 10K

The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control with ultra-stable output. The solid-state design provides low cost of ownership with high reliability.

CPS Series

Economical high frequency CPS series designed to operate at a fixed frequency over a range of 2 to 80 MHz, from 500W to 1000W. Provides ultra stable, reliable RF power for plasma applications.

CLF 5000 Series

The CLF series generators provide stable process power up to 5 kW. The half-rack supplies operate at any fixed frequency from 20 to 50 kHz. The full- rack models can operate at any fixed frequency from 20 to 450 kHz or auto-tuned up to +/- 15% bandwidth. In many applications, the combination of auto-tune and excess power headroom will allow delivery of power to changing reactive loads without the need for mechanically tuned matching networks.

CV Series

Very High Frequency CV series designed for stable VHF RF power for fixed frequencies up to 80 MHz.? Air cooled with digital and analog interfaces.? DeviceNet is optional.

CXH Series

High frequency, hybrid, high power CXH series designed to operate at a fixed frequency over a range of 2 to 40 MHz up to 100KW. Utilizes the latest in long life thoriated tungsten, water cooled, vacuum tube technology to provide stable, reliable RF power for industrial heating and plasma applications.

CDX 2000 Dual Frequency Power Supply, a solid state, compact, versatile power supply. Ideal for multi-electrode plasma processing applications.

CDX 6000 Dual Process Energy Generator, is the first to combine up to 2KW of programmable DC power with up to 4KW of RF power in one unique package. Ideal for plasma, flat panel, IC, and storage media applications.

The high-quality design of Comdel's XDC 1000 DC power supply assures ultra reliability, while the small size fits easily into your system. Current and voltage control capabilities are standard with each supply.
　

ESC Electrostatic Chuck DC power supplies provide?accurate, floating, bipolar clamping voltages for today's most stringent semiconductor processing demands.? Full featured microprocessor control for flexibility and ease of use

Match-Pro Automatic Tuning Networks with our unique PROTRAK, a high-speed tuning algorithm that allows a precise match even in high "Q" loads, across wide power ranges. Standard models for 50W to 50KW.